Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

T. Bandi, J. Baborowski, A. Dommann, H. Shea, F. Cardot, A. Neels
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引用次数: 3

Abstract

This work reports on irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20000 under vacuum. The susceptibility of the devices to radiation induced degradation was investigated using 60Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. The results support the efforts towards design and fabrication of highly reliable MEMS devices for space applications.
空间相关辐射条件下硅音叉谐振器的评价
本文报道了在硅体声波谐振器上的辐照。谐振器基于音叉几何形状,由压电氮化铝层驱动。它们的共振频率为150千赫,真空条件下的质量因数约为20000。利用60Co γ射线和50 MeV质子(空间相关剂量高达170 krad)研究了器件对辐射诱导降解的敏感性。辐照后器件的性能表明对电离损伤和位移损伤的耐受性都很高。这些结果支持了为空间应用设计和制造高可靠性MEMS器件的努力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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