Design of a PMUT array for Multifrequency Imaging

2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2021-04-19 DOI:10.1109/EuroSimE52062.2021.9410846

B. Weekers, M. Billen, R. Haouari, V. Rochus

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引用次数: 1

Abstract

In this paper, a piezoelectric micromachined ultrasound transducer (PMUT) array for multi-frequency imaging is investigated. The PMUTs are thoroughly characterized and a finite element model is created in COMSOL Multiphysics® software. First, an axisymmetric model of a single PMUT is constructed that couples the solid mechanics, electrostatics and pressure acoustics interfaces. The model accurately predicts static deformation, resonance frequencies and displacement at resonance. Finally, a full 3D model is created to investigate the origin of an observed resonance mode in the array that does not correspond to any flexural mode of the PMUTs. Acoustic crosstalk through the fluid is identified as the likely cause for this “array mode”. Acoustic coupling should therefore be considered carefully in future designs and utilized where possible to achieve improved performance or added functionality such as multi-frequency imaging.

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用于多频成像的PMUT阵列设计

本文研究了一种用于多频成像的压电微机械超声换能器阵列。对pmut进行了彻底的表征，并在COMSOL Multiphysics®软件中创建了有限元模型。首先，建立了一个耦合固体力学、静电力学和压力声学界面的轴对称模型。该模型准确地预测了静态变形、共振频率和共振位移。最后，创建了一个完整的3D模型来研究阵列中观察到的共振模式的起源，该共振模式不对应于pmut的任何弯曲模式。通过流体的声学串扰被确定为这种“阵列模式”的可能原因。因此，在未来的设计中应仔细考虑声学耦合，并在可能的情况下利用声学耦合来提高性能或增加功能，如多频成像。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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