Modeling and Simulation of Aluminium Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer for Ultrasound Imaging

2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA) Pub Date : 2019-11-01 DOI:10.1109/SPAWDA48812.2019.9019254

Mingzhu Chen, Qiaozhen Zhang, Xiangyong Zhao, Feifei Wang

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引用次数: 4

Abstract

In this work, a PMUT based on Pt/AlN/Pt/TiO2/SiO2/Si structure with square suspended membrane is proposed and modeled by performing finite element method (FEM) software COMSOL. The vibration mode, resonant frequency and effective electro-mechanical coupling coefficient (keff2) of the proposed AlN-based PMUT are analyzed. It is shown that the (0,1) resonant mode of PMUT reaches up to 25.73 MHz when the AlN thickness is 1μm. Moreover, the influences on the sensitivity of geometric parameters, i.e., the side length and thickness of top electrode, and the thickness of AlN thin film, are investigated. Maximum transmitting and receiving sensitivity of 32.79 pm/V and 0.478mV/kPa, respectively, are obtainable with optimum geometric parameters. Investigation results demonstrate that by optimizing the structure of the proposed AlN-based PMUT, keff2 and sensitivity are significantly improved, which is beneficial for meets the requirement for application of high resolution ultrasound imaging.

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基于氮化铝的压电微机械超声换能器的超声成像建模与仿真

本文提出了一种基于Pt/AlN/Pt/TiO2/SiO2/Si方形悬浮膜结构的PMUT，并利用COMSOL有限元软件对其进行了建模。分析了铝基PMUT的振型、谐振频率和有效机电耦合系数(keff2)。结果表明，当AlN厚度为1μm时，PMUT的(0,1)谐振模式达到25.73 MHz。此外，还研究了几何参数(即顶电极的边长和厚度)以及AlN薄膜的厚度对灵敏度的影响。在最优几何参数下，最大发射灵敏度为32.79 pm/V，最大接收灵敏度为0.478mV/kPa。研究结果表明，通过优化所提出的基于aln的PMUT结构，keff2和灵敏度得到了显著提高，有利于满足高分辨率超声成像的应用要求。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)

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