MEMS Gyroscope FEM Modeling and Simulation

Abstract

This paper the analysis of a 3D model of MEMS Gyroscope is presented. The FEM analysis of the 3D structure has been performed in very popular COMSOL Multiphysics software. Authors took particular attention on mechanical behaviour particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can be drawn for drive direction.