Fundamental Diffraction Limits of the Performance of Chirped Grating Lenses

J. Delavaux, W. Chang
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Abstract

Although highly efficient chirped grating lenses have been reported[1−7], their performance that will combine high efficiency η with large angular field of view Δθ or high η with low F-number is limited by the phase distortion in the diffraction process and by fabrication tolerances. In this paper, we will show how the coupling coefficient Kc and the minimum periodicity Λmin will limit the lens performance (i.e. η, Δθ and F). The efficiency is also sensitive to the variation of the line width to space width ratio obtained in the lithographic process. However, it is insenstive to the position accuracy of the individual grating grooves.
啁啾光栅透镜性能的基本衍射极限
虽然已经报道了高效啁啾光栅透镜[1−7],但它们将高效率η与大角视场Δθ或高η与低f数结合起来的性能受到衍射过程中的相位畸变和制造公差的限制。在本文中,我们将展示耦合系数Kc和最小周期性Λmin如何限制透镜性能(即η, Δθ和F)。效率也对光刻过程中获得的线宽与空间宽度比的变化很敏感。然而,它对单个光栅槽的位置精度不敏感。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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