A novel and reliable patterning technology with nickel foil on curved surfaces

Abstract

A new fabrication technology utilizing the nickel foil as the flexible mask for the non-planar surface patterning is presented. Compared with the traditional patterning on the planar substrates, the versatile micro-fabrication method based on the re-usable nickel membrane mask, has patterned on the curve surface. We shape the pattern in the nickel foil by the laser cutting. It allow for fabrication on a wide range of substrates, enabling feature line widths down to 50 μm. The nickel foil masks, gaining reconversion as force is removed, can be wrapped precisely on the targeted curve substrate.