Piezoelectric disk flexure resonator with 1 dB loss

Abstract

Disk-flexure PZT-on-silicon resonators exhibited peak |S21| of 1 dB with insertion loss of 0.92 dB. Ferroelectric tuning of bandwidth (>50%), and coupling (>35%), are demonstrated with an insertion loss penalty of 0.6 dB. Power handling measurements showed less than 1 dB compression up to the +15 dBm limit of the network analyzer. The disk-flexure resonator was monolithically integrated with length extension resonators, allowing for varied coupling and quality factor with similar insertion loss, and figure of merit in the same wafer.