Elastically gimbaled in-plane vibrating microgyroscope

Abstract

This paper reports about the design and experimental results of the vibrating micromachined gyroscope that is designed to mechanically decoupled structure with optimized two gimbals. The gyroscope is characterized by a low linearity error of less than 0.5744% full scale for a measured range of /spl plusmn/150 deg/sec under vacuum pressure of 4 mTorr. The equivalent noise density is 0.002 deg/sec//spl radic/Hz and the equivalent noise rate is less than 0.005 deg/sec. The bias is stabilized between equivalent rate of less than 0.02 deg/sec.