Device transplant of optical MEMS for out of plane beam steering

Abstract

We report on a substantially improved process for which an array of optical MEMS devices (MOEMS) are batch transferred onto a quartz wafer such that through wafer beam scanning can be achieved. MEMS optical scanners are successfully fabricated, transferred, and actuated for out-of-plane beam steering. DC transfer curves of control devices on silicon and those transferred on quartz exhibit similar pull in voltages of 135 V and 142 V respectively. Similarly, resonance for control device peaked at 1.1 kHz while transferred devices exhibit higher resonance at 1.2 kHz.