Adaptive control for micro/nano positioning system driven by piezo electric actuator

Abstract

In this paper, a novel adaptive control law for the micro/nano positioning system is proposed, where the parameterized hysteresis model is employed. The formulated control law guarantees the global stability of the controlled positioning system, and the position error can be driven to approach to zero asymptotically. The advantage is that only the parameters needed in the control design are estimated online where the variation of the parameters can also be coped with, the real values of the parameters of the positioning system need to be neither identified nor measured, and good transient performance and good position tracking can be achieved. Experimental results show the effectiveness of the proposed method.