A novel ultrasonic linear actuator

Abstract

An ultrasonic linear actuator operated by a combined wave of longitudinal vibration and flexural vibration excited by nonlinearly connected bars is described. A multilayered piezoelectric actuator was used at the actuator, and aluminum bars as the elastic body. The phase difference of expansion-contraction and bending varies with the operation frequency applied resulting in generation of the right-left movement. The new actuator showed excellent response and controllability with a small size and a high driving force. Its application to precise positioning was considered. The result of this trial is reported.<>