Microfabrication and parallel operation of 5/spl times/5 2D AFM cantilever arrays for data storage and imaging

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659720

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haeberle, H. Rohrer, H. Rothuizen, P. Vettiger

{"title":"Microfabrication and parallel operation of 5/spl times/5 2D AFM cantilever arrays for data storage and imaging","authors":"M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haeberle, H. Rohrer, H. Rothuizen, P. Vettiger","doi":"10.1109/MEMSYS.1998.659720","DOIUrl":null,"url":null,"abstract":"In this paper we report on the microfabrication of a 5/spl times/5 2D cantilever array and its successful application to parallel imaging. The 5/spl times/5 array with integrated force sensing and tip heating has been fabricated using a recently developed, all dry silicon backside etching process. The levers on the array have integrated piezoresistive sensing. The array is scanned in x and y directions using voice coil actuators. Three additional voice coil z actuators are used in a triangular arrangement to approach the sample with the array chip. The system is thus leveled in the same way as an air table. We report details of the array fabrication, the x-y scanning and approach system as well as images taken with the system.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"235 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"32","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659720","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 32

Abstract

In this paper we report on the microfabrication of a 5/spl times/5 2D cantilever array and its successful application to parallel imaging. The 5/spl times/5 array with integrated force sensing and tip heating has been fabricated using a recently developed, all dry silicon backside etching process. The levers on the array have integrated piezoresistive sensing. The array is scanned in x and y directions using voice coil actuators. Three additional voice coil z actuators are used in a triangular arrangement to approach the sample with the array chip. The system is thus leveled in the same way as an air table. We report details of the array fabrication, the x-y scanning and approach system as well as images taken with the system.

查看原文本刊更多论文

用于数据存储和成像的5/spl次/5二维AFM悬臂阵列的微加工和并行操作

本文报道了5/spl倍/5二维悬臂阵列的微加工及其在平行成像中的成功应用。集成力传感和尖端加热的5/spl倍/5阵列采用最近开发的全干硅背面蚀刻工艺制造。阵列上的杠杆集成了压阻式传感。使用音圈驱动器在x和y方向上扫描阵列。三个额外的音圈z形致动器以三角形排列使用阵列芯片接近样品。因此，该系统以与空气表相同的方式被调平。我们报告了阵列制造的细节，x-y扫描和接近系统以及用该系统拍摄的图像。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

自引率

0.00%

发文量