{"title":"A study on the fabrication and electrical characteristics of barometric sensors for USN","authors":"Sung-Hyun, Han-Bai","doi":"10.1109/ICUFN.2017.7993843","DOIUrl":null,"url":null,"abstract":"In this paper, we fabricated ceramic body and sapphire wafer in order to develop a barometric sensor with high sensitivity and high temperature stability for ubiquitous sensor network. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4mm and a thickness of 1mm by using alumina powders. Ceramic body was processed with a diameter 32.4mm and a thickness 5mm. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure. Respectively-suitable for application as the electric power source of a ubiquitous sensor network (USN) sensor node.","PeriodicalId":284480,"journal":{"name":"2017 Ninth International Conference on Ubiquitous and Future Networks (ICUFN)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Ninth International Conference on Ubiquitous and Future Networks (ICUFN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICUFN.2017.7993843","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we fabricated ceramic body and sapphire wafer in order to develop a barometric sensor with high sensitivity and high temperature stability for ubiquitous sensor network. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4mm and a thickness of 1mm by using alumina powders. Ceramic body was processed with a diameter 32.4mm and a thickness 5mm. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure. Respectively-suitable for application as the electric power source of a ubiquitous sensor network (USN) sensor node.