VHDL-AMS model of mechanical elements of MEMS tuning fork gyroscope for the schematic level of computer-aided design

Abstract

Iii the paper VHDL-AMS model for computer- aided design of MEMS tuning fork gyroscope has been created. The created model allows to model drive and sense vibrations, variations of Coriolis acceleration, capacitance and current changes of the device depending on the applied angular velocity, and also to make its functioning analysis on the schematic level of computer- aided design.