{"title":"The gigabit chip: required manufacturing approaches","authors":"J. R. Burke","doi":"10.1109/ASMC.1990.111223","DOIUrl":null,"url":null,"abstract":"Some of the objectives of the Semiconductor Research Corporation (SRC), which is a consortium whose full members include most of the major integrated circuit and equipment producing companies in the United States, are discussed. The SRC research program is discussed. The long range objectives of producing a prototype DRAM with a density of 256 Mb and a prototype 1-Gb DRAM chip are discussed. Other goals and economics are discussed.<<ETX>>","PeriodicalId":158760,"journal":{"name":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.1990.111223","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Some of the objectives of the Semiconductor Research Corporation (SRC), which is a consortium whose full members include most of the major integrated circuit and equipment producing companies in the United States, are discussed. The SRC research program is discussed. The long range objectives of producing a prototype DRAM with a density of 256 Mb and a prototype 1-Gb DRAM chip are discussed. Other goals and economics are discussed.<>