A new series resistance extraction method for junctionless nanowire transistors

Abstract

Series resistance can severely affect the electrical behavior of such Junctionless Nanowire Transistors. The aim of this work is to propose a new method for the extraction of the series resistance in Junctionless Nanowire Transistors. The method is validated by means of tridimensional numerical simulations and experimental results, using transistors with different widths and doping concentrations.