Rotation-sensitive cuts for surface acoustic waves on LGT substrates

Zhijun Chen, Lianger Li, Tao Han, W. Shi, X. Ji, Ji Wang
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引用次数: 1

Abstract

Surface acoustic wave (SAW) sensor has many outstanding advantages as a new type sensor. The SAW rotation sensor which is used to sense rotation rate has already become one of the potential applications. Based on the wave equations on anisotropic piezoelectric crystal with rotation effect, some quantitative analyses of SAW rotation effect in X-cuts, Y-cuts and Z-cuts for the new piezoelectric material LGT are given in this paper. The rotation-sensitive cut (0/spl deg/, 0/spl deg/, 27/spl deg/) Euler angle in Z-cuts are determined accordingly. On the other hand, the Euler angle (90/spl deg/, 90/spl deg/, 140/spl deg/) cut is the lowest rotation-sensitive cut in all of the X-cuts, Y-cuts and Z-cuts, so it can be utilized in some SAW devices which need low rotation effect.
LGT基板上表面声波的旋转敏感切割
表面声波传感器作为一种新型传感器,具有许多突出的优点。SAW旋转传感器用于测量旋转速率已经成为潜在的应用之一。基于具有旋转效应的各向异性压电晶体的波动方程,定量分析了新型压电材料LGT在x、y、z切口上的SAW旋转效应。旋转敏感切割(0/spl度/,0/spl度/,27/spl度/)在z切割欧拉角确定。另一方面,欧拉角切割(90/spl度/、90/spl度/、140/spl度/)是所有x切割、y切割和z切割中旋转敏感性最低的切割,因此可以用于一些需要低旋转效果的SAW器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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