Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM

Abstract

Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young's moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young's modulus and the tip-sample energy dissipation.