Iterative Adaptive Digital Processing of Semiconductor Barrier Structures Capacitance Transient Signals

Abstract

Solving the problems of applied deep-level transient spectroscopy is associated with the need to improve the measurement accuracy. This imposes increased requirements on the accuracy of sample temperature maintaining while using the frequency-temperature scanning method and digital processing of capacitance transient signals that are weak with respect to noise. This report proposes an iterative adaptive algorithm for digital processing of the converted capacitance transient signal as a function of the repetition rate of deep-level filling pulses. The algorithm uses a piecewise continuous approximation for the measured sample temperature behavior, followed by a digital correction of the frequency scan during the iteration. As a result, it is possible to increase the accuracy of the deep-level activation energy and the pre-exponential factor measurements approximately twofold.