Improvement of processing reproducibility for a magnetic-driven microstructure made of photosensitive nanocomposite

Abstract

In this paper, we investigate the reproducibility of a fabrication method for making active microstructures as micro-actuators for optical and/or fluidic micro-components. The proposed method uses a magnetic photosensitive nanocomposite made by mixing magnetic nanoparticles into photoresist without laborious processes. In the development process, the magnetic particles are taken off from the nanocomposite, and the reproducibility is drop down. It is experimentally confirmed that the dropout of the particles are reduced by increasing the exposure dose of the patterning for the active membrane made of the PNC.