Yield analysis and data management using Yield Manager/sup TM/

Abstract

A yield management system (YMS) is an essential component in a modern wafer fab tool set. The YMS provides tools to analyze and manage process and electrical test data from process metrology, in-line inspection monitoring, and electrical test operations. The system gives near-real time access to all data required to support wafer manufacturing. Typical yield enhancement (YE) activities include in-line defect reduction, yield excursion control, failure analysis, and baseline yield analysis. Each of these activities typically focus on a specific data type and/or set of analysis techniques to enhance yield. A solution which integrates various data types and analysis techniques with a common client/server interface is key to achieving the YE support needed for world class manufacturing yields. This paper describes experiences with Knights Technology Yield Manager/sup TM/ (Knights YM) as a fab-wide data integration and analysis tool. The Knights YM system is designed around a client-server architecture, with separate servers for database management and data analysis tasks. The system provides a single interface for extraction of multiple data types generated during device fabrication and testing, and tools to visualize, analyze, and correlate this data. All database and analysis functions can be accessed remotely via any terminal, workstation, or desktop PC which support x-terminal functions. At Motorola, the Knights YM system is used to facilitate fab data collection, management, and analysis. Examples of how the Knights YM system is being used to improve analysis capability, productivity, and response time are presented as case studies.