Temperature control of a rapid thermal processor based on receding horizon control

Abstract

In this paper, application of the receding horizon tracking control (RHTC) to the temperature control of a rapid thermal processor (RTP) is considered. Discrete time models of the plant are identified through relay control. The control horizon of the RHTC is chosen to cover 1 sec time and weights are used to lay penalty not only on the tracking errors but also on the discrepancy of outputs. Experimental results were obtained for 8 inch RTP based on SISO models and its extension to the TITO (two inputs two output) model is considered and tested for a simple test equipment.