Magnetically levitated X–Y plane actuator for micromanufacturing

Abstract

Abstract The paper presents design and development of a precision motion actuator, which can traverse required trajectory in the X–Y plane and can be used for micromachining applications using magnetic levitation based technology. A glass-reinforced epoxy laminate sheet with micromachined holes in the horizontal and vertical direction with copper wires placed vertically and horizontally was used for actuation of rare earth magnets wherein a pyrolytic graphite sheet was fixed over the copper wires. The diamagnetism of pyrolytic graphite sheet coupled with electromagnetic field generated because of the current passing through the copper wires led to levitation and actuation of the rare earth magnet over desired trajectory. COMSOL Multiphysics (COMSOL Inc., Burlington, Massachusetts, USA) simulation was conducted in order to simulate the forces generated by the developed actuator. Thereafter, the forces generated by the actuator with current flowing through the wires were measured using a dynamometer where the error was limited within 2%. An acrylic sheet was fixed over the actuator and laser micromachining was conducted with trajectories traversed by the actuator. Scanning electron microscope results of the machined samples confirmed that feature sizes in the range of 200–300 micron could be generated. This proves the potential of the developed actuator for micromachining applications.