A method for quantitative determination of defects in polymer layers by X-ray microanalysis and scanning electron microscopy

Polymer Science U.s.s.r. Pub Date : 1991-01-01 Epub Date: 2003-06-11 DOI:10.1016/0032-3950(91)90057-W
I.N. Sapozhnikova, A.Ye. Chalykh
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Abstract

A universal, rapid and based on scanning electron microscopy and X-ray microanalysis has been developed for determining quantitatively the defectiveness of polymeric surface coatings. The method makes use of the fact that defects, regardless of their type (concentration fluctuations, dispersed inclusions, form defects, etc.) can be considered as compositional defects, each in its own scale, and can be evaluated from the induced change in intensity of a characteristic X-ray radiation of defects containing a surface element as compared to an element without defects. Two alternatives are proposed for evaluating the defects—either from their total number (Ds) or according to defect type (Dl). The quantity Ds can be estimated by measuring the intensity of X-ray radiation in different scales: by varying the magnification in the scanning electron microscopy of the defect-containing surface area and, on the other hand, at the “point” of a defectless surface. The parameter Dl is determined by comparing the intensities of X-ray radiation from the respective “points” in the defective and defectless areas of the investigated surface. The method was checked on heterogeneous, layered filled systems similar to those used in the magnetic hard disks. The results enabled us to devise defectograms of ferromagnetic layers of magnetic memory devices (disks). By using the defects as a negative property we were able to deduce a generalized dependence property-composition.

用x射线显微分析和扫描电子显微镜定量测定聚合物层中缺陷的方法
开发了一种通用的、快速的、基于扫描电子显微镜和x射线微分析的方法来定量测定聚合物表面涂层的缺陷。该方法利用了这样一个事实,即缺陷,无论其类型(浓度波动、分散的夹杂物、形式缺陷等)如何,都可以被认为是组成缺陷,每种缺陷都有自己的尺度,并且可以从含有表面元素的缺陷与没有缺陷的元素相比的特征x射线辐射强度的诱导变化来评估。提出了两种评估缺陷的方法——从缺陷总数(Ds)或根据缺陷类型(Dl)。d的数量可以通过测量不同尺度的x射线辐射强度来估计:通过改变扫描电子显微镜对含有缺陷的表面积的放大倍率,另一方面,在无缺陷表面的“点”。参数Dl是通过比较研究表面缺陷区和缺陷区各自“点”的x射线辐射强度来确定的。该方法在异质、分层填充的系统上进行了验证,类似于在磁性硬盘中使用的系统。结果使我们能够设计磁存储器件(磁盘)的铁磁层缺陷图。通过使用缺陷作为一个负性质,我们能够推导出一个广义的依赖性质-复合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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