2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)

Fabrication and packaging of a miniature sensor array for harsh environments

Pub Date : 2001-08-25 DOI: 10.1109/MEMSC.2001.992731 E. A. Dijkstra, W. Olthuis, J. Bomer, P. Bergveld, D.A. Kronemeijer

Motorola MEMS switch technology for high frequency applications

Pub Date : 2001-08-24 DOI: 10.1109/MEMSC.2001.992733 A. de Silva, C. Vaughan, D. Frear, L. Liu, S. Kuo, J. Foerstner, J. Drye, J. Abrokwah, H. Hughes, C. Amrine, C. Butler, S. Markgraf, H. Denton, S. Springer

A fast method for analysis and modeling of optical MEMS switches

Pub Date : 2001-08-24 DOI: 10.1109/MEMSC.2001.992741 M. Basha, A. Rohani, S. Safavi-Naeini