Symposium 1993 on VLSI Technology

Compact Memory Cell Using MGI-TFT's For 16-Mb SRAM And Beyond

Pub Date : 1993-05-17 DOI: 10.1109/VLSIT.1993.760249 O. Sakamoto, H. Kuriyama, M. Ashida, K. Yuzuriha, K. Tsutsumi, S. Maeda, T. Ipposhi, S. Maegawa, T. Nishimura, Y. Kohno, H. Miyoshi

Molecular-scale Models For Simulation Of Nanometer Lithography With Application To A Negative Chemical Amplification Resist

Pub Date : 1993-05-17 DOI: 10.1109/VLSIT.1993.760292 E. W. Scheckler, T. Ogawa, T. Yoshimura, S. Shukuri, E. Takeda

Future Technology Driver: DRAM or High Speed Logic?

Pub Date : 1993-05-17 DOI: 10.1109/VLSIT.1993.760277 C. Hwang, J. Abernathey