High-Performance Acoustic Wave Devices on LiTaO3/SiC Hetero-Substrates

已完结 10 由 sfrd 发布于 2026/4/15 18:27:07

DOI:10.1109/TMTT.2023.3267556
作者：Liping Zhang;Shibin Zhang;Jinbo Wu;Pengcheng Zheng;Hongyan Zhou;Hulin Yao;Zhongxu Li;Kai Huang;Huarui Sun;Xin Ou
文献类型：期刊论文
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Institute of Electrical and Electronics Engineers (IEEE)

Abstract：We present high-performance shear horizontal surface acoustic wave (SH-SAW) and longitudinal leaky SAW (LL-SAW) devices using lithium tantalate (LiTaO3) thin films on silicon carbide (SiC) s

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