Optical colorimetric LiTaO3 wafers for high-precision lithography on frequency control of SAW devices

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DOI:10.1364/prj.499795
作者：Ming Hui Fang, Yinong Xie, Fangqi Xue, Zhilin Wu, Jun Shi, Sheng Yu Yang, Yilin Liu, Zhihuang Liu, Hsin Chi Wang, Fajun Li, Qing Huo Liu, and Jinfeng Zhu
文献类型：期刊论文
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The Optical Society

Abstract：Surface acoustic wave (SAW) resonators based on lithium tantalate (LT, LiTaO3LiTaO3) wafers are crucial elements of mobile communication filters. The use of intrinsic LT wafers typically bri

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