Method for Sensitivity Improvement of MEMS Pressure Sensor: Structural Design and Optimization of Concave Resonant Pressure Sensor

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DOI:10.1109/JSEN.2025.3526621
作者：Senhui Chuai;Jieyao Deng;Haoran Li;Kai Chen;Hang Geng;Yifan Wang;Huiliang Cao
文献类型：期刊论文
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Institute of Electrical and Electronics Engineers (IEEE)

Abstract：A single silicon island concave silicon microresonant pressure sensor based on frequency difference is proposed in this article. The resonator is designed for electrostatic drive and electro

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