AppliedPRO: process recipe optimizer for R&D acceleration and beyond

已完结 10 由 zd 发布于 2025/4/30 14:40:59

DOI:10.1117/12.2661320
作者：Deepak Gupta, Sravan Nandakumar, T. Miyagi, Oliver Jan, W. Bishara, St Chiou, Kyeong-tae Lee, Andre Kim, Sangdoo Kim, Young-Soo Um, Ki-il Kim, Changbae Park, Myeonggil Shin, K. Bai
文献类型：期刊论文
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International Society for Optics and Photonics (SPIE)

Abstract：Semiconductor process development for state-of-the-art devices is a complex task that requires up to years of development. The complexity comes from the need to tune a significant number of

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