Advanced Surface Acoustic Wave Resonators on LiTaO?/SiO?/Sapphire Substrate

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DOI:10.1109/LED.2022.3200418
作者：Jinbo Wu;Shibin Zhang;Yang Chen;Pengcheng Zheng;Liping Zhang;Hulin Yao;Zhongxu Li;Xiaomeng Zhao;Kai Huang;Tao Wu;Xin Ou
文献类型：期刊论文
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Institute of Electrical and Electronics Engineers (IEEE)

Abstract：The shear horizontal surface acoustic wave (SH-SAW) resonators with excellent quality factor and temperature stability were fabricated on 42°YX-LiTaO3/SiO2/sapphire substrate. For comparison

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上一个求助:其它数据库Naturally Fractured Carbonate Reservoir Characterization: A Case Study of a Mature High-Pour Point Oil Field in Hungary 下一个求助:MDPIOptimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression