Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

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DOI:10.3390/mi15010012
作者：Hongzhi Pan, Yang Yang, Lingqi Li, Qiaozhen Zhang, Zeyu Zheng, Xuesong Du, Pingjing Chen, Jiahe Dong, Chuan Lu, Xiao Xie, Hualin Li, Qiang Xiao, Jinyi Ma, Zhenglin Chen
文献类型：期刊论文
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MDPI

Abstract：SAW devices with a multi-layered piezoelectric substrate have excellent performance due to advantages such as a high quality factor, Q, low loss insertion, large bandwidth, etc. Prior to man

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