Atomic-scale and damage-free polishing of single crystal diamond enhanced by atmospheric pressure inductively coupled plasma

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DOI:10.1016/j.carbon.2021.05.062
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1016/j.carbon.2021.05.062

Elsevier

Abstract：Diamond is an imperative material for fabricating functional components used in ultra-hard cutting tools, infrared optical windows, high-performance heat dissipations, and other fields. Howe

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