Atom-by-Atom and Sheet-by-Sheet Chemical Mechanical Polishing of Diamond Assisted by OH Radicals: A Tight-Binding Quantum Chemical Molecular Dynamics Simulation Study

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DOI:10.1021/acsami.1c09468
作者：Kentaro Kawaguchi, Yang Wang, Jingxiang Xu, Yusuke Ootani, Yuji Higuchi, Nobuki Ozawa, Momoji Kubo*
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1021/acsami.1c09468

American Chemical Society (ACS)

Abstract：Ultraflat and damage-free single-crystal diamond is a promising material for use in electronic devices such as field-effect transistors. Diamond surfaces are conventionally prepared by the c

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