2.45-GHz microwave plasma sources using solid-state microwave generators. Collisional-type plasma source

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DOI:10.1080/08327823.2017.1293589
作者：L. Latrasse,?M. Radoiu,?J. Lo,?P. Guillot
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1080/08327823.2017.1293589

Taylor & Francis

Abstract：ABSTRACT The availability of high power solid-state microwave generators opens new directions in plasma generation with applications in industrial plasma processing at low pressure. The opti

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