Experimental Comparison of Electronic Cylotronic Resonance and Collisional Type Coaxial Plasmas Sources

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DOI:10.1109/PLASMA.2017.8496184
文献类型：期刊论文
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Institute of Electrical and Electronics Engineers (IEEE)

Abstract：Large scale industrial processes for surface treatment require uniform, dense, and quiescent plasma. One of the strategies in achieving this latter consists in distributing several microwave

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