A binary gas concentration and flow rate measurement system based on scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers

求助中 10 由六蒙骑士发布于 2026/4/11 22:11:17

DOI:10.1016/j.flowmeasinst.2024.102724
作者：Hanzhe Liu , Yuzhe Lin , Guoqiang Wu , Jifang Tao
文献类型：期刊论文
补充材料：只需要正文

Elsevier

Abstract：This paper presents an ultrasonic binary gas concentration and flow rate measurement system (UBCFS) based on a scandium-doped aluminum nitride (Sc0.2Al0.8N) piezoelectric micromachined ultra

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