{"title":"氮分压对反应直流磁控溅射制备ZrNx薄膜结构、力学性能和腐蚀行为的影响","authors":"Daoxuan Liang, Wei Dai","doi":"10.1155/2023/3604077","DOIUrl":null,"url":null,"abstract":"<p><p>ZrN<sub>x</sub> films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (<i>r</i> = N<sub>2</sub>/[Ar + N<sub>2</sub>]). The structure and composition of the thin films were characterized as a function of <i>r</i> using scanning electron microscope, glancing angle X-ray diffraction, and X-ray photoelectron spectroscopy. The hardness, adhesive strength, and corrosion behavior of the coatings were measured by nanoindentation, microscratch, and potentiodynamic measurements in 3.5 wt% NaCl solution. The results show that the structure of the ZrN<sub>x</sub> films changes from a nearly stoichiometric ZrN with a typical columnar structure to mixed phases composited of ZrN and <i>α</i>-ZrN<sub>x</sub> with a dense glass structure as <i>r</i> increases from 12% to 50%. The mechanical properties including hardness, elastic modulus, and adhesion decrease with increasing <i>r</i> due to nonstoichiometric compound and glass phase structure of the coatings, while the dense glass structure significantly improves the corrosion inhibition.</p>","PeriodicalId":21633,"journal":{"name":"Scanning","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10110377/pdf/","citationCount":"2","resultStr":"{\"title\":\"Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrN<sub>x</sub> Films Prepared by Reactive DC Magnetron Sputtering.\",\"authors\":\"Daoxuan Liang, Wei Dai\",\"doi\":\"10.1155/2023/3604077\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>ZrN<sub>x</sub> films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (<i>r</i> = N<sub>2</sub>/[Ar + N<sub>2</sub>]). The structure and composition of the thin films were characterized as a function of <i>r</i> using scanning electron microscope, glancing angle X-ray diffraction, and X-ray photoelectron spectroscopy. The hardness, adhesive strength, and corrosion behavior of the coatings were measured by nanoindentation, microscratch, and potentiodynamic measurements in 3.5 wt% NaCl solution. The results show that the structure of the ZrN<sub>x</sub> films changes from a nearly stoichiometric ZrN with a typical columnar structure to mixed phases composited of ZrN and <i>α</i>-ZrN<sub>x</sub> with a dense glass structure as <i>r</i> increases from 12% to 50%. The mechanical properties including hardness, elastic modulus, and adhesion decrease with increasing <i>r</i> due to nonstoichiometric compound and glass phase structure of the coatings, while the dense glass structure significantly improves the corrosion inhibition.</p>\",\"PeriodicalId\":21633,\"journal\":{\"name\":\"Scanning\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10110377/pdf/\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Scanning\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1155/2023/3604077\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Physics and Astronomy\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Scanning","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1155/2023/3604077","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Physics and Astronomy","Score":null,"Total":0}
Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering.
ZrNx films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (r = N2/[Ar + N2]). The structure and composition of the thin films were characterized as a function of r using scanning electron microscope, glancing angle X-ray diffraction, and X-ray photoelectron spectroscopy. The hardness, adhesive strength, and corrosion behavior of the coatings were measured by nanoindentation, microscratch, and potentiodynamic measurements in 3.5 wt% NaCl solution. The results show that the structure of the ZrNx films changes from a nearly stoichiometric ZrN with a typical columnar structure to mixed phases composited of ZrN and α-ZrNx with a dense glass structure as r increases from 12% to 50%. The mechanical properties including hardness, elastic modulus, and adhesion decrease with increasing r due to nonstoichiometric compound and glass phase structure of the coatings, while the dense glass structure significantly improves the corrosion inhibition.
期刊介绍:
Scanning provides an international and interdisciplinary medium for the rapid exchange of information among all scientists interested in scanning electron, scanning probe, and scanning optical microscopies. Areas of specific interest include all aspects of the instrumentation associated with scanning microscopies, correlative microscopy techniques, stereometry, stereology, analytic techniques, and novel applications of the microscopies.