{"title":"具有片上补偿电路的可互换硅压力传感器","authors":"P. Kopystynski, E. Obermeier","doi":"10.1016/0250-6874(89)87031-3","DOIUrl":null,"url":null,"abstract":"<div><p>A new concept for the calibration and temperature compensation of a piezoresistive silicon pressure sensor is proposed, in which the piezoresistive Wheatstone bridge is combined on chip with a trimmable polysilicon resistor network. The design, fabrication and measured characteristic of a sensor based on this concept are presented.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"18 3","pages":"Pages 239-245"},"PeriodicalIF":0.0000,"publicationDate":"1989-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87031-3","citationCount":"24","resultStr":"{\"title\":\"An interchangeable silicon pressure sensor with on-chip compensation circuitry\",\"authors\":\"P. Kopystynski, E. Obermeier\",\"doi\":\"10.1016/0250-6874(89)87031-3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A new concept for the calibration and temperature compensation of a piezoresistive silicon pressure sensor is proposed, in which the piezoresistive Wheatstone bridge is combined on chip with a trimmable polysilicon resistor network. The design, fabrication and measured characteristic of a sensor based on this concept are presented.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"18 3\",\"pages\":\"Pages 239-245\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)87031-3\",\"citationCount\":\"24\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489870313\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870313","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An interchangeable silicon pressure sensor with on-chip compensation circuitry
A new concept for the calibration and temperature compensation of a piezoresistive silicon pressure sensor is proposed, in which the piezoresistive Wheatstone bridge is combined on chip with a trimmable polysilicon resistor network. The design, fabrication and measured characteristic of a sensor based on this concept are presented.
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