H.-D Bauer , B Arnold , K Bartsch , R Rennekamp , A Leonhardt
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引用次数: 5
摘要
采用等离子体辅助化学气相沉积(PACVD)技术在wc - co -hard - metal衬底上制备了由TiN和Al2O3组成的耐磨多层膜。用透射电镜(TEM)研究了层状体系的横截面。揭示了层的形成与层的纳米结构之间的关系。扫描模式下的电子能量损失谱(EELS)用于纳米级界面区域的研究,其中元素和键合特定信号用于表征。
Manufacturing and structure investigation of TiN-Al2O3-multilayers
Wear resistant multilayers consisting of the components TiN and Al2O3 are deposited on WC-Co-hardmetal substrates by plasma assisted chemical vapour deposition (PACVD) using different variants. Cross sections of the layered system are investigated by means of analytical transmission electron microscopy (TEM). Correlations between the layer formation and the nanostructure of the layers are revealed. Electron energy loss spectroscopy (EELS) in the scanning mode is used for the investigation of nanoscale interface regions, whereby both element- and bonding specific signals are used for characterization.