用激光烧蚀新技术合成粉末和薄膜

R Houriet , R Vacassy , H Hofmann
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引用次数: 17

摘要

提出了一种利用陶瓷靶材制备粉体和薄膜的新方法。结果表明,激光火花雾化器(LINA-SPARK™),LSA,结合了在大气压和环境温度下工作的优点,可以在相对较高的沉积速率(约1 μm·min - 1)下生成具有网状结构的高度均匀的薄膜。以工业陶瓷试样(Al2O3)为原料,研究了粉末颗粒和涂层的制备。利用这种新技术制备了高度团聚的纳米粉末和均匀的网状介孔涂层。纳米粒子的形成是在液化过程中形成的,液化过程产生气溶胶,然后是液滴的冷却/凝固,形成烟雾。气溶胶和烟雾的一般动力学都有利于聚集过程,形成微米大小的分形颗粒。激光火花雾化器可用于制备高介孔厚膜。孔隙度可以通过载气流速来改变,从而可以控制涂层的微观结构,使这些纳米颗粒厚膜适合应用于膜技术、催化和锂离子电池。采用该方法制备的ZrO2和SnO2纳米颗粒厚膜的微观结构完全相同。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis of powders and films using a new laser ablation technique

A novel method to produce powders and films from ceramic targets is presented. It is shown that the laser spark atomizer (LINA-SPARK™), LSA, combines the advantages of operating at atmospheric pressure and ambient temperature to produce highly uniform films with a web-like structure which can be deposited at relatively high deposition rates (ca. 1 μm·min−1). The preparation of powder particles and coating starting from commercial ceramic specimen (Al2O3) is investigated. Highly agglomerated nanopowders and homogeneous mesoporous coatings forming a web-like structure are prepared using this new technique. The formation of the nanoparticles is explained following a liquefaction process which generates an aerosol, followed by the cooling/solidification of the droplets which results in the formation of a smoke. The general dynamic of both the aerosol and the smoke favors the aggregation process and micrometer-sized fractal-like particles are formed. The laser spark atomizer can be used to produce highly mesoporous thick films. The porosity can be modified by the carrier gas flow rate thus enabling for a control of the microstructure of the coatings which make these nanoparticulate thick films suitable candidates for application in membrane technology, catalysis and lithium ion batteries. ZrO2 and SnO2 nanoparticulate thick films are also synthesized successfully using this new process with quite identical microstructure.

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