Cu衬底上Sn薄膜早期晶须的形成

B. Illés, T. Hurtony, O. Krammer, R. Bátorfi, B. Medgyes, G. Harsányi
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引用次数: 0

摘要

Cu衬底上的Sn薄膜由于在Sn-Cu界面处形成了密集的Cu6Sn5金属间化合物而具有较高的Sn晶须生长敏感性。本研究直接从锡沉积开始,研究了镀在Cu衬底上的真空蒸发锡薄膜的晶须发育。目的是获得更多关于Sn薄膜在生命周期早期的晶须行为的信息。在本研究中,99.99%的纯锡被真空蒸发到Cu衬底上。采用两种不同表面粗糙度的Cu衬底,研究表面粗糙度对晶须生长的影响。蒸发锡层的平均厚度为~2 μ m,样品在室温下保存10周。扫描电镜观察晶须发育情况。结果表明,即使在Sn层沉积1天后,由于金属间化合物的形成,Sn层中存在较大的压应力,导致了晶须的发育。几乎只检测到长丝型晶须。在研究的第10天,晶须密度的特征呈指数饱和,而在研究结束时,晶须的长度仍在进一步增长。研究还发现,Cu衬底的表面粗糙度影响晶须的生长速度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Early Stage Whisker Development from Sn Thin Film on Cu Substrate
The Sn thin film on Cu substrate has high Sn whisker growth susceptibility because of the intensive Cu6Sn5 intermetallic formation at the Sn-Cu interface. In this study, the whisker development on vacuum evaporated Sn thin film deposited on Cu substrates was investigated, starting directly from the Sn deposition. The aim was to obtain more information about the whiskering behavior of Sn thin film in the early stage of the life cycle. For the study, 99.99% pure tin was vacuum evaporated onto Cu substrates. Two different Cu substrates were applied with different surface roughness to investigate the effect of surface roughness on the whisker development. The average thickness of the evaporated Sn layer was ~2 μ m. Samples were stored at room temperature for 10 weeks. Whisker development was observed by scanning electron microscope. It was found that the large compressive stress in the Sn layer because of the intermetallic formation initiates the whisker development even after 1 day of the Sn layer deposition. Almost only filament type whiskers were detected. The characteristics of the whisker density showed exponential saturation up to 10 days of the study, while the length of the whiskers was growing further still the end of the study. It was also found that the surface roughness of the Cu substrate affects the rate of whisker growth.
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