中熵等原子FeNiCoCu薄膜合金的制备方法及结构相态

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP) Pub Date : 2020-11-09 DOI:10.1109/NAP51477.2020.9309616

Y. Shkurdoda, A.M. Chomous, Yu.M. Shabelnyk, L. Dekhtyaruk, V. Loboda, S. Khursenko

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引用次数: 1

摘要

介绍了等原子薄膜合金FeNiCoCu的制备方法和结构、化学及相组成的研究结果。结果表明，该方法制备的薄膜为单相(FeNi (CoCu)固溶体，晶格参数a=0.377 ~ 0.359nm)、晶粒尺寸为20 ~ 40 nm的多晶薄膜。

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Method of Production and Structural-phase State of Medium -entropy Equiatomic FeNiCoCu Film Alloy

The method of obtaining and the results of studies of the structure, chemical and phase composition of the equiatomic film alloy FeNiCoCu are described. It is shown that the films obtained by this method are single-phase (FeNi (CoCu) solid solution with a crystal lattice parameter a=0.377-0.359nm), polycrystalline with a grain size of 20-40 nm.

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2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)

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