大气压下射频驱动微等离子体的数值模拟

2008 IEEE 35th International Conference on Plasma Science Pub Date : 2010-06-20 DOI:10.1109/PLASMA.2010.5534160

T. Hemke, A. Wollny, M. Gebhardt, R. Brinkmann, T. Mussenbrock

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引用次数: 0

摘要

只提供摘要形式。近年来，越来越多的不同微等离子体源被开发出来。这些源在潜在的应用中有所不同，因此存在不同类型的几何形状和放电配置，直流或射频放电以及使用的化学物质。各种各样的应用包括-除其他外-广泛的表面修饰，光源，灭菌和显示面板。

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Numerical simulation of an rf driven micro-plasmajet at atmospheric pressure

Summary form only given. An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.

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2008 IEEE 35th International Conference on Plasma Science

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