表面微加工MEMS角立方反反射器阵列

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659081

Yu-Fan Chen, H. Chang, Bo-Jiun Chen, J. Tsai

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引用次数: 0

摘要

提出了一种利用MUMPs多晶硅表面微加工工艺制备的MEMS角立方反反射器线性阵列。CCR的开口垂直向上，提供了易用性和更好的视野。可调性可以通过采用可驱动反射镜作为CCR的三个反射镜之一来实现。提出了一种新型的N × N CCR阵列的组合方法。

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Surface-micromachined MEMS corner cube retro-reflector array

A linear array of MEMS corner cube retro-reflectors (CCR) fabricated with the MUMPs polysilicon surface micromachining process is presented. The CCR's opening faces straight upwards, providing ease of use and better field of view. Tunability can be achieved by employing a drivable mirror as one of the CCR's three mirrors. A novel idea of assembling an N × N CCR array is also proposed.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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