薄膜纳米结构 neburg透镜的制备与表征

C. Hsieh, Jun Xu, Hanhong Gao, N. Fang, G. Barbastathis
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引用次数: 1

摘要

通过在绝缘体上硅晶片上刻印硅棒,制备了具有制导条件校正的薄膜纳米结构 neburg透镜,并用近场扫描光学显微镜对其进行了表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication and characterization of thin-film nanostructured Lüneburg lens
A thin-film nanostructured Lüneburg lens with guidance condition correction has been fabricated by patterning a slab of silicon-rods on silicon-on-insulator wafer, and has been characterized using a near-field scanning optical microscope.
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