锌掺杂二氧化钛薄膜的电学和光学性质

Fariha Anjum, M. Samir Ullah, Jiban Podder, M. Shahjahan, Md. Mizanur Rahman
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引用次数: 0

摘要

采用喷雾热解沉积(SPD)技术制备了纯二氧化钛(TiO2)和锌(Zn)掺杂的TiO2薄膜。所制备薄膜的沉积温度保持在$450^{\ mathm {o}}\ mathm {C}$,并用x射线衍射(XRD)方法对所制备薄膜的结构性能进行了表征。XRD分析结果表明,薄膜的结构为非晶相。利用扫描电镜(SEM)和能谱仪(EDS)研究了薄膜的表面形貌和组成。用四点探针法观察了材料的电学特性,特别是电阻率随温度的变化。结果表明,样品的电阻率随温度的升高而降低,并表现出半导体性质。用紫外可见分光光度计测定其透光率。纯TiO2在可见光区的透过率约为70%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrical and Optical Properties of Zinc doped Titanium dioxide Thin Films
We have prepared pure Titanium dioxide (TiO2) and Zinc (Zn) doped TiO2 thin films by spray pyrolysis deposition (SPD) technique. The deposition temperature of the prepared thin films was maintained at $450^{\mathrm{o}}\mathrm{C}$ The structural property of the prepared thin films was characterized by X-ray diffraction (XRD) method. The results of XRD data showed that the structure of the as-deposited thin films was amorphous phase. The surface morphology and composition of the thin films were investigated by scanning electron microscope (SEM) and energy dispersive X-ray Spectroscopy (EDS), respectively. The electrical property, in particular, electrical resistivity was observed by four-point probe method as a function of temperature. It is depicted that the resistivity decreased with increasing temperature and exhibited semiconducting nature of the sample. The optical transmittance was measured by the UV-visible spectrometer. The transmittance for the pure TiO2 was found about 70% in the visible region.
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