Introduction of the Allan Variance Method in Studying the Physical and Chemical Processes on the Solid Body Surface

The Allan variation method is being effectively used to study stability of frequency generators and noise characteristics of the dynamic processes of various physical nature presented in the form of time series. At the same time, the methods of nonlinear dynamics, in particular, of the fractal analysis, are used both in processing the time series and in studying irregularities in profiles or surfaces. By analogy with this, the possibility of introducing the Allan variance method to analyze alterations in the solid body surface during chemical and thermal treatment was evaluated. Introduction of the Allan variance method makes it possible to quantify the roughness components corresponding to the surface defects of a certain size. Alterations in the surface of grounded and polished quartz glass plates were studied, as well as the melted rods during chemical dissolution of the surface layer. The presented graphs and calculated Allan variations for the profiles of various surfaces clearly demonstrate that alterations in the surface relief standard deviation during chemical etching of the quartz plates and bars is associated with the surface defects size. The results of studying the surface stay in good agreement with the estimates made by the fractal analysis method. Introduction of the Allan variance method makes it possible to optimize both the mechanical and the chemical surface treatment mode of various parts during their manufacture