{"title":"飞秒激光钻铜:建模与实验比较","authors":"Yi Liu, Chung-Wei Cheng, J. Chen","doi":"10.2961/jlmn.2020.01.2005","DOIUrl":null,"url":null,"abstract":"This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm2. A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"71 1","pages":"25-30"},"PeriodicalIF":0.8000,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Femtosecond Laser Drilling of Copper: Modeling and Experiment Comparison\",\"authors\":\"Yi Liu, Chung-Wei Cheng, J. Chen\",\"doi\":\"10.2961/jlmn.2020.01.2005\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm2. A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.\",\"PeriodicalId\":54788,\"journal\":{\"name\":\"Journal of Laser Micro Nanoengineering\",\"volume\":\"71 1\",\"pages\":\"25-30\"},\"PeriodicalIF\":0.8000,\"publicationDate\":\"2020-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Laser Micro Nanoengineering\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.2961/jlmn.2020.01.2005\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Laser Micro Nanoengineering","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.2961/jlmn.2020.01.2005","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Femtosecond Laser Drilling of Copper: Modeling and Experiment Comparison
This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm2. A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.
期刊介绍:
Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge.
JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.