飞秒激光钻铜:建模与实验比较

IF 0.8 4区 材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY
Yi Liu, Chung-Wei Cheng, J. Chen
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引用次数: 4

摘要

本文从实验和理论两方面研究了波长为515 nm、脉宽为300 fs的飞秒绿色激光脉冲对铜的烧蚀作用。用单脉冲激光对铜进行加工,激光脉冲的影响可达789 J/cm2。采用考虑温度相关带间转变的改进德鲁德临界点(DCP)模型、两温度模型(TTM)、两相变化模型和一相爆炸模型获得了温度相关特性和烧蚀深度。与传统的DCP模型相比,该方法模拟的烧蚀深度与实验结果吻合得更好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Femtosecond Laser Drilling of Copper: Modeling and Experiment Comparison
This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm2. A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.
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来源期刊
Journal of Laser Micro Nanoengineering
Journal of Laser Micro Nanoengineering 工程技术-材料科学:综合
CiteScore
1.90
自引率
9.10%
发文量
18
审稿时长
3 months
期刊介绍: Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge. JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.
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