富al掺杂c薄膜的结构相变

IF 0.8 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Nano Research Pub Date : 2022-11-21 DOI:10.4028/p-801jk8

Arsen E. Hafarov, D. I. Trubchaninova, A. Burmak, M. Karpets, I. Vladymyrskyi, A. Kaidatzis, Dimitros Niarchos

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引用次数: 0

摘要

研究了沉积在硅衬底上的碳掺杂富铝MnAl薄膜的晶体结构。研究了含碳量和真空热处理参数的影响。结果表明，碳含量与热处理相结合，可以调整薄膜的结构相变。检测到的主要相为Al2Mn3、纯Mn和纯c。随着碳含量的增加，Al2Mn3相的数量减少，纯结晶Mn相的含量增加。此外，随着热处理温度的升高(高达500℃)，Al2Mn3相含量增加，而在较低温度下出现纯C相。

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Structural Phase Transitions in Al-Rich C-Doped Mnal Thin Films

We study the crystal structure of carbon-doped Al-rich MnAl thin films deposited on Si substrates. The effects of carbon content and vacuum heat treatment parameters are studied. It is shown that the carbon content, in combination to heat treatment, allows to tailor structural phase transitions in the films. The main phases detected are Al2Mn3, pure Mn, and pure C. As carbon content increases, the amount of Al2Mn3 phase decreases and the content of pure crystallized Mn phase increases. In addition, it is shown that as the heat treatment temperature increases – up to 500 °C – the Al2Mn3 phase content increases, whereas a pure C phase appears at lower temperatures.

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来源期刊

Journal of Nano Research 工程技术-材料科学：综合

CiteScore

2.40

自引率

5.90%

发文量

审稿时长

4 months

期刊介绍： "Journal of Nano Research" (JNanoR) is a multidisciplinary journal, which publishes high quality scientific and engineering papers on all aspects of research in the area of nanoscience and nanotechnologies and wide practical application of achieved results. "Journal of Nano Research" is one of the largest periodicals in the field of nanoscience and nanotechnologies. All papers are peer-reviewed and edited. Authors retain the right to publish an extended and significantly updated version in another periodical.